Low Power Energy Harvesting System Ic for Tri-plate Electrostatic Converters
نویسندگان
چکیده
This paper proposes a low power EHC that performs synchronous energy conversion on a tri-plate variable capacitor to improve the maximum achievable power. A tri-plate macro electrostatic generator with capacitor variation of 405 pF to 1.15 nF and 405 pF to 1.07 nF on two complementary adjacent capacitors operating 180° out of phase at 98 Hz is fabricated and used in the characterization of the designed EHC. The IC is fabricated using the AMI 0.7 μm high voltage CMOS process and tested with the tri-plate capacitor to demonstrate mechanical to electric energy conversion. In steady state operation, the EHC produces a total output power of 1.04 μW to a 10 μF reservoir capacitor from a 98 Hz vibration signal.
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